|
Date/Time
|
State
|
Computer
|
Applcation
|
User
|
Class
|
Type
|
Text1 - Text10
|
PText1 - PText10
|
|
2025-11-23 00:04:41
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-23 00:04:41
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:55:35
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:52:05
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:52:05
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:45:13
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:44:53
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:44:53
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:36:23
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:36:21
|
G
|
|
|
|
Alarm
|
Alarm High
|
Fresh Air Cooling Coil Temperature (TS5/8209)
|
AHU8209
|
Alarm High
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:36:03
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:36:03
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:31:29
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:29:26
|
C
|
|
|
|
Alarm
|
Alarm High
|
Fresh Air Cooling Coil Temperature (TS5/8209)
|
AHU8209
|
Alarm High
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:29:26
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Fresh Air Cooling Coil Temperature (TS5/8209)
|
AHU8209
|
Alarm High
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:27:18
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:27:18
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:26:05
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:25:34
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:25:34
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:19:34
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:19:04
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:19:04
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:16:35
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:13:47
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:13:47
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:12:28
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:10:36
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:10:36
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 23:08:18
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:48:18
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:48:18
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:46:57
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:44:06
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:44:06
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:41:13
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:40:13
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:40:13
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:38:50
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:37:04
|
G
|
|
|
|
Alarm
|
Alarm High
|
Fresh Air Cooling Coil Temperature (TS5/8209)
|
AHU8209
|
Alarm High
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:35:18
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:35:18
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:33:53
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:22:30
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:22:30
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:21:07
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:20:17
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:20:17
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:18:16
|
C
|
|
|
|
Alarm
|
Alarm High
|
Fresh Air Cooling Coil Temperature (TS5/8209)
|
AHU8209
|
Alarm High
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:18:16
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Fresh Air Cooling Coil Temperature (TS5/8209)
|
AHU8209
|
Alarm High
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:16:34
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:15:30
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:15:30
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:13:54
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:13:13
|
G
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:12:15
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:12:15
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:10:33
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:09:59
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:09:59
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:03:33
|
C
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:03:33
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:02:59
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:02:51
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 22:02:51
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 21:56:32
|
C
|
|
|
|
Alarm
|
Alarm High
|
Room P326 Temperature (TS4/8218)
|
AHU8218
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 21:47:52
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 21:47:50
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 21:47:50
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 21:12:39
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 21:12:28
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 21:12:28
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 21:02:59
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 21:02:34
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 21:02:34
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:58:31
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:56:55
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:56:55
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:53:41
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:53:13
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:53:13
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:50:46
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:50:43
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:50:43
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:49:48
|
C
|
|
|
|
System, does not require acknowledgment
|
Process control system
|
|
Fan Belt Trip
|
SYNC::AHU-CLIENT1:LAN-Sync: time synchronized with PC ahu-scada-serv1
|
|
|
|
|
|
|
|
AHU-CLIENT1
|
ahu-scada-serv1
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:49:23
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:49:20
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:49:20
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:47:48
|
C
|
|
|
|
System, does not require acknowledgment
|
Process control system
|
|
|
SYNC::AHU-CLIENT1:LAN-Sync: time synchronization set to PC ahu-scada-serv1
|
|
|
|
|
|
|
|
AHU-CLIENT1
|
ahu-scada-serv1
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:43:21
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:43:06
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:43:06
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:40:07
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:39:24
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:39:24
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:22:12
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:21:47
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:21:47
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:13:34
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:13:24
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:13:24
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:06:29
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:05:52
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 20:05:52
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:59:50
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:59:01
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:59:01
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:54:51
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:54:18
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:54:18
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:50:57
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:50:38
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:50:38
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:44:43
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:44:22
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:44:22
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:40:34
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:40:30
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:40:30
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:39:15
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:38:04
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:38:04
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:37:01
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:36:22
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:36:22
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:34:59
|
G
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:34:10
|
C
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:34:10
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:06:34
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:03:36
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:03:36
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 19:01:51
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:40:34
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:40:34
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:39:13
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:38:08
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:38:08
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:35:37
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:35:10
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:35:10
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:31:58
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:30:36
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:30:36
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:29:14
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:29:10
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:29:10
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:27:16
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:26:07
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:26:07
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:24:52
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:24:09
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:24:09
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:22:54
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:21:44
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:21:44
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:21:02
|
G
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:19:46
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:18:14
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:18:14
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:17:00
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:16:48
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:16:48
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:15:33
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:14:55
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:14:55
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:08:53
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:07:20
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:07:20
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:05:18
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:04:58
|
C
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:04:58
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:04:32
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:04:32
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:03:07
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 18:02:13
|
G
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:54:55
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:54:55
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:52:03
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:51:04
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:51:04
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:49:48
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:47:53
|
G
|
|
|
|
Alarm
|
Alarm Low
|
Return Air Temperature (THS1/8230)
|
AHU8230
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:44:52
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:44:52
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:43:29
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:43:17
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:43:17
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:41:54
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:38:27
|
C
|
|
|
|
Alarm
|
Alarm Low
|
Return Air Temperature (THS1/8230)
|
AHU8230
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:37:11
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:37:11
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:37:06
|
C
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:37:06
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:35:52
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:33:33
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:33:33
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:31:57
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:31:16
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:31:16
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:29:06
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:28:04
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:28:04
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:26:17
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:25:39
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:25:39
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:24:14
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:16:16
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:16:16
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:14:47
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:12:27
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:12:27
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:11:11
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:10:37
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:10:37
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:07:07
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:06:49
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:06:49
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:05:29
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:04:02
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:04:02
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:02:40
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:02:35
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 17:02:35
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:58:58
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:58:09
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:58:09
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:56:44
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:53:36
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:53:36
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:46:42
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:46:39
|
G
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:44:25
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:44:25
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:43:09
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:39:06
|
C
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:39:06
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:37:26
|
G
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:37:04
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:37:04
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:33:14
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:31:22
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:31:22
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:30:07
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:29:52
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:29:52
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:27:01
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:26:16
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:26:16
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:25:02
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:24:59
|
C
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:24:59
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:21:31
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:21:31
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:19:48
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:19:14
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:19:14
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:17:31
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:17:09
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:17:09
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:16:20
|
G
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:14:55
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:14:32
|
C
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:14:32
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:13:31
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:13:31
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:10:05
|
G
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:02:29
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 16:01:53
|
C
|
|
|
|
Alarm
|
Alarm High
|
Return Air Humidity (THS1/8230)
|
AHU8230
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:59:50
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:59:50
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:56:32
|
G
|
|
|
|
Alarm
|
Alarm Low
|
Return Air Humidity (THS1/8210)
|
AHU8210
|
Alarm Low
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:52:05
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:48:11
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:48:11
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:43:54
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:37:53
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:37:53
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:36:31
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:36:02
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:36:02
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:25:57
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:19:34
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:19:34
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:18:28
|
C
|
|
|
|
Alarm
|
Alarm Low
|
Return Air Humidity (THS1/8210)
|
AHU8210
|
Alarm Low
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:18:28
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm Low
|
Return Air Humidity (THS1/8210)
|
AHU8210
|
Alarm Low
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:13:31
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:12:36
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:12:36
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:11:17
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:10:36
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:10:36
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:08:07
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:07:24
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 15:07:24
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:59:05
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:58:03
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:58:03
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:55:16
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:55:03
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:55:03
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:49:50
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:46:20
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:46:20
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:44:06
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:41:31
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:41:31
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:40:13
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:25:26
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:25:26
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:21:08
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:20:22
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:20:22
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:18:32
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:17:30
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:17:30
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:16:11
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:15:24
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:15:24
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:14:09
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:07:15
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:07:15
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 14:05:30
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:58:02
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:58:02
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:56:42
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:53:40
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:53:40
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:51:17
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:48:29
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:48:29
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:44:51
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:44:47
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:44:47
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:41:50
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:38:01
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:38:01
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:35:34
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:35:08
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:35:08
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:21:36
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:20:35
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:20:35
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:12:37
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:11:59
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:11:59
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:10:08
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:09:20
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:09:20
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:03:23
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:02:55
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:02:55
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:00:19
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:00:16
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 13:00:16
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:57:52
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:56:19
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:56:19
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:41:38
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:39:36
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:39:36
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:30:28
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:29:57
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:29:57
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:25:38
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:25:26
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:25:26
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:23:50
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:20:08
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:20:08
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:18:32
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:17:40
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:17:40
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:10:36
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:08:59
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:08:59
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:06:44
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:06:15
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:06:15
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:04:53
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:03:52
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 12:03:52
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:59:15
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:58:34
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:58:34
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:56:12
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:53:40
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:53:40
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:46:28
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:45:46
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:45:46
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:34:33
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:34:25
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:34:25
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:31:26
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:31:15
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:31:15
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:30:10
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:25:25
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:25:25
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:24:02
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:21:19
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:21:19
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:19:59
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:19:40
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:19:40
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:14:27
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:14:24
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:14:24
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:13:18
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:12:51
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:12:51
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:06:31
|
G
|
|
|
|
Alarm
|
Alarm Low
|
Return Air Humidity (THS1/8210)
|
AHU8210
|
Alarm Low
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:02:16
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:00:48
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 11:00:48
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:58:12
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:57:16
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:57:16
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:55:02
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:51:10
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:51:10
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:49:02
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:46:19
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:46:19
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:43:37
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:42:42
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:42:42
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:41:19
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:38:50
|
C
|
|
|
|
Alarm
|
Alarm Low
|
Return Air Humidity (THS1/8210)
|
AHU8210
|
Alarm Low
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:38:50
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm Low
|
Return Air Humidity (THS1/8210)
|
AHU8210
|
Alarm Low
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:36:19
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:36:19
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:33:13
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:33:00
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:33:00
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:32:02
|
G
|
|
|
|
Alarm
|
Alarm High
|
Supply Air Temperature (THS3/8208)
|
AHU8208
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:29:54
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:27:26
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:27:26
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:26:00
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:22:51
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:22:51
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:16:20
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:15:52
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:15:52
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:06:39
|
G
|
|
|
|
Alarm
|
Alarm Low
|
Return Air Humidity (THS1/8210)
|
AHU8210
|
Alarm Low
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:06:32
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:06:04
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:06:04
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:03:26
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:02:44
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:02:44
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:01:21
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:00:50
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 10:00:50
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:58:00
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:54:34
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:54:34
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:52:06
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:51:47
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:51:47
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:48:08
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:42:35
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:42:35
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:41:20
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:41:00
|
C
|
|
|
|
Alarm
|
Alarm High
|
Supply Air Temperature (THS3/8208)
|
AHU8208
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:41:00
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Supply Air Temperature (THS3/8208)
|
AHU8208
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:38:18
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:38:18
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:36:50
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:36:01
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:36:01
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:33:30
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:31:36
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:31:36
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:30:20
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:24:42
|
C
|
|
|
|
Alarm
|
Alarm Low
|
Return Air Humidity (THS1/8210)
|
AHU8210
|
Alarm Low
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:24:42
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm Low
|
Return Air Humidity (THS1/8210)
|
AHU8210
|
Alarm Low
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:22:31
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:22:31
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:21:08
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:20:05
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:20:05
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:18:42
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:16:54
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:16:54
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:15:39
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:14:05
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:14:05
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:11:19
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:10:29
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:10:29
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:09:07
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:08:04
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:08:04
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:04:51
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:01:03
|
C
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 09:01:03
|
Acknowledgment - System
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 08:57:21
|
G
|
|
|
|
Alarm
|
Alarm High
|
Clean Room Pressure (PS5/8203)
|
AHU8203
|
Low Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2025-11-22 08:52:53
|
G
|
|
|
|
Alarm
|
Alarm High
|
Inlet Temperature (TS12/8208)
|
AHU8208
|
High Alarm
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
